1 2 3 4 5 6 7
5 F_SiH3.mmp Si 0.000000 0.000000 -0.594000 F 0.000000 0.000000 1.042000 H -0.705000 1.222000 -1.053000 H -0.705000 -1.222000 -1.053000 H 1.411000 0.000000 -1.053000